Hiwin Air bearing stage – LMAS
Hiwin Air bearing stage – LMAS : Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation.
Air bearing stage – LMAS
Feature | Air bearing stage – LMAS
Hiwin Air bearing stage – LMAS : It is leading by using vacuum preloaded air bearing with low consumption, dynamic counter balancing technology and mass compensation algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.
- Non-contact air bearing provide better positioning accuracy.
- Embedded magnetic preloading design, enhance stability
- Provideextremely smooth motion and rapid setting time
- Equipped with ironless linear motor, no cogging
- High resolution feedback with linear motor, no cogging
- high resolution feedback with linear optical encoder
- Equipped with high flexi ble cable
- For clean room, no need to lubricate and easy to maintain
- Low velocity ripple
- Available for precision positioning, calibraion systems, scanning applications, wafer inspection
Dimensions | Air bearing stage – LMAS
| Type | Stroke | Dimensions | ||||
|---|---|---|---|---|---|---|
| A | B | C | D | N | ||
| AS200 | 200 | 280 | – | 526 | 619 | 2 |
| AS400 | 400 | 480 | – | 726 | 819 | 2 |
| AS600 | 600 | 580 | – | 926 | 1019 | 2 |
| AS800 | 800 | 440 | 880 | 1126 | 1219 | 4 |
| AS1000 | 1000 | 540 | 1080 | 1326 | 1419 | 4 |
Specifications | Air bearing stage – LMAS
| Specifications | Unit | AS200 | AS400 | AS600 | AS800 | AS1000 |
|---|---|---|---|---|---|---|
| Stroke | mm | 200 | 400 | 600 | 800 | 1000 |
| Motor type | – | LMCB8 | ||||
| Bus voltage | V | Up to 325 VDC | ||||
| Instant current | A(pk) | 6 | ||||
| Continuous current | A(rms) | 2.0 | ||||
| Feedback system | – | Optical Linear Encoder : Analog period 20µm | ||||
| Resolution*1 | µm | 4 | ||||
| Repeatability | µm | ±0.3 | ±0.4 | ±0.4 | ±0.5 | ±0.5 |
| Positioning accuracy*2 | µm | ±3.0 | ±4.0 | ±4.0 | ±5.0 | ±5.0 |
| Horizontal straightness*3 | µm | ±1.0 | ±1.0 | ±1.5 | ±2.0 | ±2.5 |
| Vertical straightness*3 | µm | ±1.0 | ±1.0 | ±1.5 | ±2.0 | ±2.5 |
| Pitch*3 | arc-sec | ±2.0 | ±2.5 | ±3 | ±3.5 | ±4 |
| Yaw*3 | arc-sec | ±2.0 | ±2.5 | ±3 | ±3.5 | ±4 |
| Roll*3 | arc-sec | TBD | ||||
| Allowable payload | kg | 10 | ||||
| Max. speed*4*5 | m/s | 1 | 1.2 | 1.4 | 1.6 | 2 |
| Max. acceleration*5 | m/s2 | 10 | 11 | 12 | 13 | 14 |
| Working pressure*6 | N/m2 | 4×105 N/m2 ± 2×104 N/m2 | ||||
| Moving unit mass*7 | kg | 8 | ||||
| Moving unit material | – | Alumimum (hardned anodized) | ||||
| Base | – | Granite | ||||
Note :
- The maximum resolution is up to 4096 times, resolution accuracy is about 4 nm
- Absolute accuracy is after error mapping.
- Required specification is restricted by load, this specification is based on empty load
- Must comply with the resolution of encoder and number of mass transfer rate
- Based on the limitations of motor instantly force, only allow moving unit mass about 8kg (center load)
- It is recommended to link pressure switch on the emergency stop devices to protect air bearing from overloading
- Free of load
ติดต่อ Hiwin, Linear Motion, Automation, Robot, System Intregration
